What kind of substrate materials can be used?
A variety of substrate materials can be used. Our standard substrate is a 30mm diameter glass microscope cover slide. These cover slides are ideally matched for our standard 1.4NA 100x oil immersion microscope objective.
In general the choice of the substrate material influences the choice of the microscope objective and of the photosensitive material. For example when writing on non transparent substrate materials as e.g. silicon, the substrate has to be mounted upside down on the sample holder with the photosensitive material towards the microscope objective. Thus the use of liquid resist is not straight forward in this case. The photosensitive material has to be spin coated on the substrate and an air objective is then used for the writing process.
We offer sample holders for the following substrate types and sizes:
- 30mm diameter glass microscope cover slides; 170µm thick
- 25mmx25mm glass microcope cover slides; 170µm thick
- Microfluidic channel holders (Translume)
- 2” wafer
- 4” wafer
- 5” rectangular mask
Please contact us for specific customer designed sample holders!
What is the maximum substrate size?
A maximum substrate size of up to 125 x 125 mm² and a thickness of up to 2 mm can be mounted. Specific substrate holders can be made on request.
Can you write on bent and curved surfaces?
The substrate bend and tilt can be measured via the autofocus system. A linear or a polynomial fit can then be used as substrate surface.
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