Nanoscribe GmbH - True 3D Laser Lithography
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What is the maximum writing area?

Category: Laser Lithography » Photonic Professional
Tags: feature size, piezo, writing area, xy stage
Last update: 2010-12-13 09:06 | Author: Alexander Legant | Revision: 1.0 |

The maximum accesible area measures 100 x 100 mm² for our standard substrate holder in combination with the motorized scanning stage of the system. These values however depend on the choice of objectives. The movement is realized combining a piezoelectric scanning stage (travel range: 300x300x300 μm³) and a motorized stage with a writing field of up to 100x100 mm².



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