The maximum writing speed for getting reasonable feature quality depends on the minium bends of your structures. Straight lines may be written with maximum speed. The inertia of the piezo however limits the maximum writing speed for curves, bends and corners. In general a reasonable writing speed is somewhere in between 10µm/s and 500µm/s.
The writing speed at which a sufficient polymerization takes place is determined by the choice/sensitivity of the photoresist, the available laser power, microscope objective and the velocity of the piezoelectric scanning stage or alternatively the motorized scanning stage. So far, writing speeds of 2 mm/s in As2S3 and in SU-8 led to sufficient polymerization.
The maximum travel velocity of the motorized stage is 100 mm/s. The piezo’s resonance frequency is on the order of 50 Hz. Hence, the maximum recommended writing speed should not exceed 9 mm/s for the piezo system. These values are hardware limits.
Kontakt / Contact