How to obtain the information on the tilt correction values of different Measurement points which is later used by the tilt correction tool to get a tilt profile of the substrate?

Unfortunately it is not possible for now to have access to the measurment data of the tilt-correction. If you need this let us know in which form you would like to have access and we can think of implementing this in a future Nanowrite release.

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Comment of Nandashayee:
It would be helpful if the values of X and Y with the Z drive position of the microscope and the corresponding Z value of the piezo being used at that particular point is provided.
Added at: 2011-04-11 12:54